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polysilicon silicon nitride ceramics

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polysilicon silicon nitride ceramics

Silicon nitride ceramic insulation ring has good insulation, good toughness, high temperature resistance and
good shock resistance, it has long life. And the addition of sintering additives are helpful to densification.
It can meet the environment requirements of polysilicon reducing furnace, improve the work efficiency.

Technical parameters:
High purity silicon nitride ceramic products, purity (%) >99; volume density (g / cm3) >3.20; Porosity (%) 1200; flexural strength at normal temperature (MPA): 650;
flexural strength (MPA) at high temperature of 1400 DEG C: 485;
coefficient of thermal expansion (x 10-6/ DEG C) 3.2;
the max working temperature (DEG C) 1400;
the max temperature of working in protective environment (DEG C) 1800;
resistivity: 1018 OHM; Voltage resistance: above 20000V

Pub Time : 2020-07-14 16:18:04 >> News list

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